Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 8384903 | Detection system for nanometer scale topographic measurements of reflective surfaces | Henrik Nielsen, Lionel Kuhlmann | 2013-02-26 | $24,419,000 |
| 7342672 | Detection system for nanometer scale topographic measurements of reflective surfaces | Henrik Nielsen, Lionel Kuhlmann | 2008-03-11 | $16,428,000 |
| 6999183 | Detection system for nanometer scale topographic measurements of reflective surfaces | Henrik Nielsen, Lionel Kuhlmann | 2006-02-14 | $14,879,000 |
| 5266798 | High sensitivity, large detection area particle sensor for vacuum applications | Peter G. Borden, Maurits Kain, James B. Stolz | 1993-11-30 | $1,159,000 |
| 5212580 | Low cost stage for raster scanning of semiconductor wafers | George L. Coad, James B. Stolz, Yung-Chao Lee, Ron B. Whitney, Peter G. Borden | 1993-05-18 | $1,261,000 |
| 5132548 | High sensitivity, large detection area particle sensor for vacuum applications | Peter G. Borden, Maurits Kain, James B. Stolz | 1992-07-21 | $1,253,000 |