| 8384903 |
Detection system for nanometer scale topographic measurements of reflective surfaces |
Henrik Nielsen, Lionel Kuhlmann |
2013-02-26 |
| 7342672 |
Detection system for nanometer scale topographic measurements of reflective surfaces |
Henrik Nielsen, Lionel Kuhlmann |
2008-03-11 |
| 6999183 |
Detection system for nanometer scale topographic measurements of reflective surfaces |
Henrik Nielsen, Lionel Kuhlmann |
2006-02-14 |
| 5266798 |
High sensitivity, large detection area particle sensor for vacuum applications |
Peter G. Borden, Maurits Kain, James B. Stolz |
1993-11-30 |
| 5212580 |
Low cost stage for raster scanning of semiconductor wafers |
George L. Coad, James B. Stolz, Yung-Chao Lee, Ron B. Whitney, Peter G. Borden |
1993-05-18 |
| 5132548 |
High sensitivity, large detection area particle sensor for vacuum applications |
Peter G. Borden, Maurits Kain, James B. Stolz |
1992-07-21 |