Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8902948 | Polarization purity control device and gas laser apparatus provided with the same | Shinji Nagai, Osamu Wakabayashi, Kouji Kakizaki | 2014-12-02 |
| 8891574 | Polarization purity control device and gas laser apparatus provided with the same | Shinji Nagai, Osamu Wakabayashi, Kouji Kakizaki | 2014-11-18 |
| 8855167 | Gas discharge chamber | Shinji Nagai, Osamu Wakabayashi, Kouji Kakizaki | 2014-10-07 |
| 8610095 | Extreme ultraviolet light source device | Takayuki Yabu, Takeshi Asayama, Osamu Wakabayashi | 2013-12-17 |
| 8503499 | Gas discharge chamber | Shinji Nagai, Osamu Wakabayashi, Kouji Kakizaki | 2013-08-06 |
| 8165181 | Polarization purity control device and gas laser apparatus provided with the same | Shinji Nagai, Osamu Wakabayashi, Kouji Kakizaki | 2012-04-24 |
| 6627843 | Casing for laser device, production method and cleaning method of the same | Yasuo Itakura, Osamu Wakabayashi | 2003-09-30 |