Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6953644 | Method for compensating for scatter/reflection effects in particle beam lithography | Christian Ebi, Frank Erber, Torsten Franke, Tarek Lutz, Günther Ruhl +1 more | 2005-10-11 |
| 6692875 | Mask for optical projection systems, and a process for its production | Werner Fischer, Rainer Pforr, Jorg Thiele | 2004-02-17 |
| 6627392 | Method of transferring a pattern of high structure density by multiple exposure of less dense partial patterns | Rainer Pforr | 2003-09-30 |
| 6466373 | Trimming mask with semitransparent phase-shifting regions | Rainer Pforr, Christoph Friedrich, Klaus Ergenzinger, Uwe Griesinger, Wilhelm Maurer +1 more | 2002-10-15 |