Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7410732 | Process for producing a mask | Jens Schneider | 2008-08-12 |
| 7289231 | Apparatus and method for determining physical properties of a mask blank | Markus Menath | 2007-10-30 |
| 7087910 | Method for detecting and compensating for positional displacements in photolithographic mask units and apparatus for carrying out the method | Jens Schneider | 2006-08-08 |
| 6953644 | Method for compensating for scatter/reflection effects in particle beam lithography | Christian Ebi, Frank Erber, Torsten Franke, Fritz Gans, Günther Ruhl +1 more | 2005-10-11 |