Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9349804 | Composite wafer for bonding and encapsulating an SiC-based functional layer | Rudolf Berger, Hans-Joachim Schulze, Anton Mauder, Wolfgang Lehnert, Roland Rupp | 2016-05-24 |
| 9147639 | Semiconductor dies having opposing sides with different reflectivity | Mathias Vaupel | 2015-09-29 |
| 7799583 | System for separation of an electrically conductive connection | Markus Hammer, Regina Kainzbauer | 2010-09-21 |
| 7071110 | Process for the plasma etching of materials not containing silicon | Josef Mathuni | 2006-07-04 |
| 6953644 | Method for compensating for scatter/reflection effects in particle beam lithography | Christian Ebi, Frank Erber, Torsten Franke, Fritz Gans, Tarek Lutz +1 more | 2005-10-11 |
| 6919147 | Production method for a halftone phase mask | Josef Mathuni | 2005-07-19 |
| 6797638 | Plasma-etching process for molybdenum silicon nitride layers on half-tone phase masks based on gas mixtures containing monofluoromethane and oxygen | Norbert Falk | 2004-09-28 |