Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8992689 | Method for removing halogen-containing residues from substrate | Adauto Diaz, Andrew Nguyen, Benjamin Schwarz, Jared Ahmad Lee, James P. Cruse +4 more | 2015-03-31 |
| 8845816 | Method extending the service interval of a gas distribution plate | Adauto Diaz, Andrew Nguyen, Benjamin Schwarz, Jared Ahmad Lee, James P. Cruse +4 more | 2014-09-30 |
| 8101025 | Method for controlling corrosion of a substrate | Chungdee Pong, Changhun Lee, Mark Kawaguchi, Guowen Ding | 2012-01-24 |
| 8097088 | Methods for processing substrates in a dual chamber processing system having shared resources | Adauto Diaz, Benjamin Schwarz, James P. Cruse, Charles Hardy | 2012-01-17 |