Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11914306 | Predicting defect rate based on lithographic model parameters | Ulrich Klostermann, Ulrich Welling, Jiuzhou Tang, Hans-Jürgen Stock | 2024-02-27 |
| 10802393 | Extreme ultraviolet (EUV) lithography mask | Lei Sun, Obert R. Wood, II, Genevieve Beique, Yulu Chen, Francis Goodwin | 2020-10-13 |
| 10622266 | Methods of identifying space within integrated circuit structure as mandrel space or non-mandrel space | Genevieve Beique, Nicholas V. LiCausi, Lei Sun, Francis Goodwin | 2020-04-14 |
| 10332745 | Dummy assist features for pattern support | Lei Sun, Ruilong Xie, Wenhui Wang, Yulu Chen, Zhengqing John Qi +2 more | 2019-06-25 |
| 9484258 | Method for producing self-aligned vias | Ryan Ryoung-Han Kim, Wenhui Wang, Lei Sun, Yulu Chen | 2016-11-01 |
| 9478462 | SAV using selective SAQP/SADP | Wenhui Wang, Ryan Ryoung-Han Kim, Lei Sun, Yulu Chen | 2016-10-25 |