| 8638026 |
Stage drive device |
Masashi Shibahara, Mikio Tokuyama, Koichiro Takeuchi, Shigeru Haneda, Osamu Yamada +2 more |
2014-01-28 |
| 8074293 |
Defective product inspection apparatus, probe positioning method and probe moving method |
Yasuhiro Mitsui, Takashi Furukawa, Hiroshi Yanagita, Susumu Kato, Osamu Satou +2 more |
2011-12-06 |
| 7598755 |
Probe navigation method and device and defect inspection device |
Takashi Furukawa, Takayuki Mizuno, Hirofumi Sato |
2009-10-06 |
| 7553334 |
Defective product inspection apparatus, probe positioning method and probe moving method |
Yasuhiro Mitsui, Takashi Furukawa, Hiroshi Yanagita, Susumu Kato, Osamu Satou +2 more |
2009-06-30 |
| 7372283 |
Probe navigation method and device and defect inspection device |
Takashi Furukawa, Takayuki Mizuno, Hirofumi Sato |
2008-05-13 |
| 7297945 |
Defective product inspection apparatus, probe positioning method and probe moving method |
Yasuhiro Mitsui, Takashi Furukawa, Hiroshi Yanagita, Susumu Kato, Osamu Satou +2 more |
2007-11-20 |
| 7129727 |
Defect inspecting apparatus |
Tsutomu Saito, Osamu Yamada, Yasuhiko Nara, Hirofumi Sato, Yoshikazu Inada +1 more |
2006-10-31 |
| 7071713 |
Probe navigation method and device and defect inspection device |
Takashi Furukawa, Takayuki Mizuno, Hirofumi Sato |
2006-07-04 |
| 7015483 |
Focused ion beam system |
Wataru Suzuki |
2006-03-21 |
| 6403968 |
Scanning electron microscope |
Masaki Kurihara, Kaname Takahashi |
2002-06-11 |
| 5393977 |
Charged particle beam apparatus and it's operating method |
Akimitsu Okura, Mitsugu Sato, Osamu Yamada, Yasushi Nakaizumi |
1995-02-28 |
| 5384507 |
Method of and device for driving piezo-electric elements and system for controlling micromotion mechanism |
Ryuji Takada |
1995-01-24 |
| 5256876 |
Scanning tunnel microscope equipped with scanning electron microscope |
Osamu Yamada, Yasushi Nakaizumi, Shigeyuki Hosoki, Sumio Hosaka, Akira Hashimoto |
1993-10-26 |
| 5081353 |
Combined scanning electron and scanning tunnelling microscope apparatus and method |
Osamu Yamada, Yasushi Nakaizumi |
1992-01-14 |
| 5026995 |
Particle beam surface analyzer |
Tadashi Otaka, Minoru Shimizu |
1991-06-25 |
| RE33473 |
Oil feeding device for scroll fluid apparatus |
Masaya Imai, Kenji Tojo, Masao Shiibayashi |
1990-12-04 |
| RE33236 |
Bearing device of sealed type scroll compressor |
Hiroaki Kuno, Naoshi Uchikawa, Takahiro Tamura, Akira Murayama, Takao Mizuno |
1990-06-19 |
| 4749344 |
Oil feeding device for scroll fluid apparatus |
Yoshikatsu Tomita, Katsuaki Kikuchi, Tetsuya Arata, Masao Shiibayashi, Kazutaka Suefuji +2 more |
1988-06-07 |
| 4639146 |
Thrust bearing |
Masahiro Yoshioka, Hideki Izumi, Hiroshi Inouye, Shiro Nakadaira |
1987-01-27 |
| 4555224 |
Oil feeding device for scroll fluid apparatus |
Masaya Imai, Kenji Tojo, Masao Shiibayashi |
1985-11-26 |
| 4551082 |
Bearing device of sealed type scroll compressor |
Hiroaki Kuno, Naoshi Uchikawa, Takahiro Tamura, Akira Murayama, Takao Mizuno |
1985-11-05 |
| 4502852 |
Oil feeding device for scroll fluid apparatus |
— |
1985-03-05 |
| 4473343 |
Bearing device for scroll-type compressor |
Kenji Tojo, Naoshi Uchikawa, Akira Murayama |
1984-09-25 |
| 4462772 |
Oil feeding device for scroll fluid apparatus |
Masaya Imai, Kenji Tojo, Masao Shiibayashi |
1984-07-31 |