Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9373518 | Method and apparatus for preventing native oxide regrowth | Shuogang Huang | 2016-06-21 |
| 9297773 | X-ray fluorescence analysis of thin-film coverage defects | — | 2016-03-29 |
| 9297775 | Combinatorial screening of metallic diffusion barriers | Sean Barstow, Ashish Bodke, Zhendong Hong, Usha Raghuram, Karthik Ramani +3 more | 2016-03-29 |
| 9005366 | In-situ reactor cleaning in high productivity combinatorial system | — | 2015-04-14 |
| 8901677 | Nucleation interface for high-k layer on germanium | Frank Greer, Chi-I Lang, Ratsamee Limdulpaiboon, Sandip Niyogi, Kurt Pang +1 more | 2014-12-02 |
| 8795542 | Removal of silicon nitrides during manufacturing of semiconductor devices | — | 2014-08-05 |
| 8663977 | Vertically retractable flow cell system | — | 2014-03-04 |
| 8632690 | Method and apparatus for preventing native oxide regrowth | Shuogang Huang | 2014-01-21 |