Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7505832 | Method and apparatus for determining a substrate exchange position in a processing system | Akihiro Hosokawa, Hung T. Nguyen | 2009-03-17 |
| 7007919 | Slit valve method and apparatus | Wendell T. Blonigan, Emanuel Beer, Jaime Munoz, Sam Kim | 2006-03-07 |
| 6916147 | Substrate storage cassette with substrate alignment feature | Wendell T. Blonigan, Rolf Guenther | 2005-07-12 |