Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11520241 | Lithography supports with defined burltop topography | Matthew Lipson, Iliya Sigal | 2022-12-06 |
| 9285687 | Inspection apparatus, lithographic apparatus, and device manufacturing method | Stanislav Smirnov, Lev Ryzhikov, Eric Brian Catey, Adel Joobeur, Yevgeniy Konstantinovich Shmarev +1 more | 2016-03-15 |