| 7914603 |
Particle trap for a plasma source |
Ali Shajii, Xing Chen, Andrew Cowe, William Robert Entley, ShouQian Shao |
2011-03-29 |
| 7853364 |
Adaptive controller for ion source |
James D. Deakins, Dennis John Hansen, Leonard Mahoney, Tolga Erguder |
2010-12-14 |
| 7718983 |
Sputtered contamination shielding for an ion source |
Daniel E. Siegfried, Richard Blacker, Valery Alexeyev, John Keem, Vsevolod Zelenkov +1 more |
2010-05-18 |
| 7566883 |
Thermal transfer sheet for ion source |
Scott A. Townsend, Daniel E. Siegfried |
2009-07-28 |
| 7476869 |
Gas distributor for ion source |
Scott A. Townsend, Daniel E. Siegfried |
2009-01-13 |
| 7439521 |
Ion source with removable anode assembly |
Scott A. Townsend, Daniel E. Siegfried |
2008-10-21 |
| 7425709 |
Modular ion source |
Daniel E. Siegfried, Scott A. Townsend, Valery Alexeyev |
2008-09-16 |
| 7425711 |
Thermal control plate for ion source |
Scott A. Townsend, Daniel E. Siegfried |
2008-09-16 |
| 7342236 |
Fluid-cooled ion source |
Scott A. Townsend, Daniel E. Siegfried, Viacheslav V. Zhurin |
2008-03-11 |
| 6984942 |
Longitudinal cathode expansion in an ion source |
Daniel E. Siegfried, Scott A. Townsend, John Keem, Valery Alexeyev, Vsevolod Zelenkov +1 more |
2006-01-10 |
| 6919690 |
Modular uniform gas distribution system in an ion source |
Daniel E. Siegfried, Scott A. Townsend, John Keem, Mark Krivoruchko, Valery Alexeyev +1 more |
2005-07-19 |