| 8374830 |
Grid transparency and grid hole pattern control for ion beam uniformity |
Ikuya Kameyama |
2013-02-12 |
| 7718983 |
Sputtered contamination shielding for an ion source |
David M. Burtner, Richard Blacker, Valery Alexeyev, John Keem, Vsevolod Zelenkov +1 more |
2010-05-18 |
| 7716021 |
Grid transparency and grid hole pattern control for ion beam uniformity |
Ikuya Kameyama |
2010-05-11 |
| 7566883 |
Thermal transfer sheet for ion source |
David M. Burtner, Scott A. Townsend |
2009-07-28 |
| 7476869 |
Gas distributor for ion source |
David M. Burtner, Scott A. Townsend |
2009-01-13 |
| 7439521 |
Ion source with removable anode assembly |
David M. Burtner, Scott A. Townsend |
2008-10-21 |
| 7425709 |
Modular ion source |
David M. Burtner, Scott A. Townsend, Valery Alexeyev |
2008-09-16 |
| 7425711 |
Thermal control plate for ion source |
David M. Burtner, Scott A. Townsend |
2008-09-16 |
| 7342236 |
Fluid-cooled ion source |
David M. Burtner, Scott A. Townsend, Viacheslav V. Zhurin |
2008-03-11 |
| 7070071 |
Dispensing apparatus and method for liquid products, particularly medicinal products |
Bohdan Pavlu, Hans Himbert, Christian Peclat, Emmanuel Gremion, Alain Saurer +1 more |
2006-07-04 |
| 6984942 |
Longitudinal cathode expansion in an ion source |
David M. Burtner, Scott A. Townsend, John Keem, Valery Alexeyev, Vsevolod Zelenkov +1 more |
2006-01-10 |
| 6919690 |
Modular uniform gas distribution system in an ion source |
David M. Burtner, Scott A. Townsend, John Keem, Mark Krivoruchko, Valery Alexeyev +1 more |
2005-07-19 |
| 6758837 |
Liquid delivery device and method of use thereof |
Christian Peclat, Emmanuel Gremion, Alain Saurer, Stefan Kaser, Beat Villiger +1 more |
2004-07-06 |