Longitudinal cathode expansion in an ion source

Assignee

• Veeco Instruments

Inventors

• Daniel E. Siegfried (13 patents)
• David M. Burtner (11 patents)
• Scott A. Townsend (9 patents)
• John Keem (28 patents)
• Valery Alexeyev (4 patents)
• Vsevolod Zelenkov (4 patents)
• Mark Krivoruchko (4 patents)

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