Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7718983 | Sputtered contamination shielding for an ion source | David M. Burtner, Daniel E. Siegfried, Richard Blacker, Valery Alexeyev, John Keem +1 more | 2010-05-18 |
| 6984942 | Longitudinal cathode expansion in an ion source | Daniel E. Siegfried, David M. Burtner, Scott A. Townsend, John Keem, Valery Alexeyev +1 more | 2006-01-10 |
| 6919690 | Modular uniform gas distribution system in an ion source | Daniel E. Siegfried, David M. Burtner, Scott A. Townsend, John Keem, Mark Krivoruchko +1 more | 2005-07-19 |
| 6864486 | Ion sources | Valery V. Alekseev, Mark Krivoruchko, John Keem | 2005-03-08 |