Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8374830 | Grid transparency and grid hole pattern control for ion beam uniformity | Daniel E. Siegfried | 2013-02-12 |
| 8309937 | Grid providing beamlet steering | — | 2012-11-13 |
| 7716021 | Grid transparency and grid hole pattern control for ion beam uniformity | Daniel E. Siegfried | 2010-05-11 |