| 7724012 |
Contactless testing of wafer characteristics |
Andrew Marshall |
2010-05-25 |
| 7109838 |
System for integrating a toroidal inductor in a semiconductor device |
Kenneth D. Brennan, Douglas A. Prinslow |
2006-09-19 |
| 7001848 |
Hydrogen plasma photoresist strip and polymeric residue cleanup process for oxygen-sensitive materials |
Patricia B. Smith, Stephen W. Russell |
2006-02-21 |
| 6958294 |
Method for photoresist strip, sidewall polymer removal and passivation for aluminum metallization |
Patricia B. Smith, Guoqiang Xing |
2005-10-25 |
| 6727185 |
Dry process for post oxide etch residue removal |
Patricia B. Smith, Antonio Luis Pacheco Rotondaro, Eric C. Williams |
2004-04-27 |
| 6599829 |
Method for photoresist strip, sidewall polymer removal and passivation for aluminum metallization |
Patricia B. Smith, Guoqiang Xing |
2003-07-29 |
| 6600208 |
Versatile system for integrated circuit containing shielded inductor |
Kenneth D. Brennan, Douglas A. Prinslow |
2003-07-29 |
| 6246120 |
Sidewalls for guiding the via etch |
Kenneth D. Brennan, Eden Zielinski, Peter S. McAnally |
2001-06-12 |
| 6074943 |
Sidewalls for guiding the via etch |
Kenneth D. Brennan, Eden Zielinski, Peter S. McAnally |
2000-06-13 |