CL

Chiukin Lai

Applied Materials: 4 patents #2,506 of 7,310Top 35%
Overall (All Time): #1,214,555 of 4,157,543Top 30%
4
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
9147578 Contact clean by remote plasma and repair of silicide surface Xinliang Lu, Chien-Teh Kao, Mei Chang 2015-09-29
7867789 Contact clean by remote plasma and repair of silicide surface Xinliang Lu, Chien-Teh Kao, Mei Chang 2011-01-11
7550381 Contact clean by remote plasma and repair of silicide surface Xinliang Lu, Chien-Teh Kao, Mei Chang 2009-06-23
6933021 Method of TiSiN deposition using a chemical vapor deposition (CVD) process Jing-Pei (Connie) Chou, Chien-Teh Kao, Roderick C. Mosely, Mei Chang 2005-08-23