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One dimensional beam blanker array |
— |
2004-10-12 |
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Gated photocathode for controlled single and multiple electron beam emission |
Kim Y. Lee, Tai-Hon Philip Chang, Marian Mankos |
2002-04-23 |
| 6220914 |
Method of forming gated photocathode for controlled single and multiple electron beam emission |
Kim Y. Lee, Tai-Hon Philip Chang, Marian Mankos |
2001-04-24 |
| 6145438 |
Method and apparatus for direct writing of semiconductor die using microcolumn array |
Tai-Hon Philip Chang |
2000-11-14 |
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Dose modulation and pixel deflection for raster scan lithography |
Frank E. Abboud, Andrew J. Muray |
1995-02-28 |
| 5103101 |
Multiphase printing for E-beam lithography |
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1992-04-07 |
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Automated system for extracting design and layout information from an integrated circuit |
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1992-02-04 |
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MOS Dynamic RAM cell and method of fabrication |
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1983-10-11 |
