Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7987150 | Method and apparatus for automated rule-based sourcing of substrate microfabrication defects | Victor V. Luu, Thieu Nguyen Trinh, Phong Van Nguyen, Luan Thien Dinh, Khoa Pham Dang Truong | 2011-07-26 |
| 7229845 | Automated sourcing of substrate microfabrication defects using defects signatures | Victor V. Luu | 2007-06-12 |
| 5103101 | Multiphase printing for E-beam lithography | C. Neil Berglund, John R. Thomas | 1992-04-07 |