Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7851109 | Low stress pellicle frames and reticle pellicle assemblies | Kishore K. Chakravorty, Henry Yun | 2010-12-14 |
| 6570155 | Bi-directional electron beam scanning apparatus | Richard W. Prior | 2003-05-27 |
| 5393987 | Dose modulation and pixel deflection for raster scan lithography | Andrew J. Muray, C. Neil Berglund | 1995-02-28 |