Patents per Year
Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 7851109 | Low stress pellicle frames and reticle pellicle assemblies | Kishore K. Chakravorty, Henry Yun | 2010-12-14 | $13,117,000 |
| 6570155 | Bi-directional electron beam scanning apparatus | Richard W. Prior | 2003-05-27 | $43,913,000 |
| 5393987 | Dose modulation and pixel deflection for raster scan lithography | Andrew J. Muray, C. Neil Berglund | 1995-02-28 |