Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7901847 | Use of soft adhesive to attach pellicle to reticle | David Mushell | 2011-03-08 |
| 7851109 | Low stress pellicle frames and reticle pellicle assemblies | Kishore K. Chakravorty, Frank E. Abboud | 2010-12-14 |
| 7763399 | Removal of ionic residues or oxides and prevention of photo-induced defects, ionic crystal or oxide growth on photolithographic surfaces | Archita Sengupta | 2010-07-27 |
| 6895157 | Thermal optical switch apparatus and methods with enhanced thermal isolation | Mahmood Toofan, Arianne L. Baker | 2005-05-17 |