Issued Patents All Time
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8766706 | Methods for trapping charge in a microelectromechanical system and microelectromechanical system employing same | Markus Lutz, Aaron Patridge | 2014-07-01 |
| 8343790 | Methods for trapping charge in a microelectromechanical system and microelectromechanical system employing same | Markus Lutz, Aaron Partridge | 2013-01-01 |
| 8225471 | Injection molded energy harvesting device | — | 2012-07-24 |
| 8020266 | Method of producing a device | Markus Ulm, Matthias Metz | 2011-09-20 |
| 7898046 | Microelectromechanical systems encapsulation process | Markus Ulm, Matthias Metz, Tino Fuchs, Franz Laermer, Silvia Kronmueller | 2011-03-01 |
| 7824943 | Methods for trapping charge in a microelectromechanical system and microelectromechanical system employing same | Markus Lutz, Aaron Partridge | 2010-11-02 |
| 7767482 | Microelectromechanical systems having stored charge and methods for fabricating and using same | Markus Lutz, Aaron Partridge | 2010-08-03 |
| 7671515 | Microelectromechanical devices and fabrication methods | Matthias Metz, Zhiyu Pan, Markus Ulm, Gary Yama | 2010-03-02 |
| 7625773 | Anti-stiction technique for electromechanical systems and electromechanical device employing same | Markus Lutz, Aaron Partridge, Wilhelm Frey, Markus Ulm, Matthias Metz +1 more | 2009-12-01 |
| 7626316 | Passive self-tuning resonator system | Inna Kozinsky, Robert N. Candler | 2009-12-01 |
| 7582514 | Microelectromechanical systems encapsulation process with anti-stiction coating | Cyril Vancura, Markus Ulm, Matthias Metz, Tino Fuchs, Franz Laermer +1 more | 2009-09-01 |
| 7563633 | Microelectromechanical systems encapsulation process | Markus Ulm, Matthias Metz, Tino Fuchs, Franz Laermer, Silvia Kronmueller | 2009-07-21 |
| 7456042 | Microelectromechanical systems having stored charge and methods for fabricating and using same | Markus Lutz, Aaron Partridge | 2008-11-25 |
| 7449355 | Anti-stiction technique for electromechanical systems and electromechanical device employing same | Markus Lutz, Aaron Partridge, Wilhelm Frey, Markus Ulm, Matthias Metz +1 more | 2008-11-11 |
| 7414351 | Energy harvesting device manufactured by print forming processes | Markus Ulm, Matthias Metz | 2008-08-19 |
| 7029829 | Low temperature method for forming a microcavity on a substrate and article having same | Khalil Najafi | 2006-04-18 |