| 10707113 |
End effector assembly for clean/dirty substrate handling |
Ross Embertson, Austin Ngo, Matthew J. Rodnick |
2020-07-07 |
| 10566216 |
Equipment front end module gas recirculation |
Peter R. Wassei, Scott Wong, Silvia Rocio Aguilar Amaya, Todd A. Lopes, Richard H. Gould +2 more |
2020-02-18 |
| 9966290 |
System and method for wafer alignment and centering with CCD camera and robot |
— |
2018-05-08 |
| 9831110 |
Vision-based wafer notch position measurement |
Gustavo G. Francken, Peter Thaulad, Zhuozhi Chen, Richard K. Lyons, Christian DiPietro +1 more |
2017-11-28 |
| 9779977 |
End effector assembly for clean/dirty substrate handling |
Ross Embertson, Austin Ngo, Matthew J. Rodnick |
2017-10-03 |
| 9698036 |
Stacked wafer cassette loading system |
Silvia Aguilar, Scott Wong, Derek John Witkowicki, Richard H. Gould, Candi Kristoffersen |
2017-07-04 |
| 9536764 |
End effector for wafer transfer system and method of transferring wafers |
Ross Embertson |
2017-01-03 |
| 9214375 |
End effector having multiple-position contact points |
Matthew J. Rodnick, Andrew J. Nagengast, Richard M. Blank |
2015-12-15 |
