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2003-04-22 |
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System and method for thermal processing of a semiconductor substrate |
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2002-06-11 |
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System and method for thermal processing of a semiconductor substrate |
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2002-06-04 |
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2002-03-12 |
| 6342691 |
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2002-01-29 |
| 6172337 |
System and method for thermal processing of a semiconductor substrate |
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2001-01-09 |
| 6143129 |
Inductive plasma reactor |
Stephen E. Savas, Martin L. Hammond, Steven C. Selbrede |
2000-11-07 |
| 6133550 |
Method and apparatus for thermal processing of semiconductor substrates |
Stewart Griffiths, Robert H. Nilson, Stephen E. Savas |
2000-10-17 |
| 6046439 |
System and method for thermal processing of a semiconductor substrate |
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2000-04-04 |
| 6043460 |
System and method for thermal processing of a semiconductor substrate |
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2000-03-28 |
| 6002109 |
System and method for thermal processing of a semiconductor substrate |
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1999-12-14 |
| 5811022 |
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1998-09-22 |
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