Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6403925 | System and method for thermal processing of a semiconductor substrate | Kristian E. Johnsgard, Brad S. Mattson, James McDiarmid | 2002-06-11 |
| 6399921 | System and method for thermal processing of a semiconductor substrate | Kristian E. Johnsgard, Brad S. Mattson, James McDiarmid | 2002-06-04 |
| 6172337 | System and method for thermal processing of a semiconductor substrate | Kristian E. Johnsgard, Brad S. Mattson, James McDiarmid | 2001-01-09 |
| 6046439 | System and method for thermal processing of a semiconductor substrate | Kristian E. Johnsgard, Brad S. Mattson, James McDiarmid | 2000-04-04 |
| 6043460 | System and method for thermal processing of a semiconductor substrate | Kristian E. Johnsgard, Brad S. Mattson, James McDiarmid | 2000-03-28 |
| 6002109 | System and method for thermal processing of a semiconductor substrate | Kristian E. Johnsgard, Brad S. Mattson, James McDiarmid | 1999-12-14 |
| 5765135 | Speech therapy system | Arye Friedman, Eliezer Fetterman | 1998-06-09 |
| 5215619 | Magnetic field-enhanced plasma etch reactor | David Cheng, Dan Maydan, Sasson Somekh, Kenneth R. Stalder, Dana L. Andrews +4 more | 1993-06-01 |
| 4842683 | Magnetic field-enhanced plasma etch reactor | David Cheng, Dan Maydan, Sasson Somekh, Kenneth R. Stalder, Dana L. Andrews +4 more | 1989-06-27 |