Issued Patents All Time
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11466360 | Enhanced cathodic ARC source for ARC plasma deposition | Viktor Kanarov, Yuriy N. Yevtukhov, Sandeep Kohli, Xingjie Fang | 2022-10-11 |
| 10128083 | Ion sources and methods for generating ion beams with controllable ion current density distributions over large treatment areas | Rustam Yevtukhov, Robert Hieronymi, Alan V. Hayes, Mathew Levoso, Peter I. Porshnev | 2018-11-13 |
| 10014164 | Ion beam materials processing system with grid short clearing system for gridded ion beam source | Rustam Yevtukhov, Rhodri Elliott, James M. Best, Jr., Peter I. Porshnev | 2018-07-03 |
| 9978934 | Ion beam etching of STT-RAM structures | Ajit Paranjpe, Katrina Rook, Narasimhan SRINIVASAN | 2018-05-22 |
| 9347127 | Film deposition assisted by angular selective etch on a surface | Vincent Ip, Adrian Devasahavam | 2016-05-24 |
| 9206500 | Method and apparatus for surface processing of a substrate using an energetic particle beam | Roger P. Fremgen, Alan V. Hayes, Viktor Kanarov, Robert Krause, Ira Reiss +1 more | 2015-12-08 |
| 8835869 | Ion sources and methods for generating an ion beam with controllable ion current density distribution | Rustam Yevtukhov, Viktor Kanarov, Alan V. Hayes | 2014-09-16 |
| 8158016 | Methods of operating an electromagnet of an ion source | Alan V. Hayes, Rustam Yevtukhov, Viktor Kanarov | 2012-04-17 |
| 8157976 | Apparatus for cathodic vacuum-arc coating deposition | Ivan I. Aksenov, Olexandr A. Luchaninov, Volodymyr Evgenievich Strelnytskiy, Volodymyr V. Vasylyev, Isaak Zaritskiy +1 more | 2012-04-17 |
| 7879201 | Method and apparatus for surface processing of a substrate | Viktor Kanarov, Hariharakeshave S. Hegde, Alan V. Hayes, Emmanuel Lakios | 2011-02-01 |
| 7557362 | Ion sources and methods for generating an ion beam with a controllable ion current density distribution | Rustam Yevtukhov, Alan V. Hayes, Viktor Kanarov | 2009-07-07 |
| 7183716 | Charged particle source and operation thereof | Viktor Kanarov, Alan V. Hayes, Rustam Yevtukhov, Ira Reiss, Roger P. Fremgen +5 more | 2007-02-27 |
| 6716322 | Method and apparatus for controlling film profiles on topographic features | Hari Hedge, Alan V. Hayes, Viktor Kanarov, Adrian Devasahayam, Emmanuel Lakios | 2004-04-06 |
| 6464891 | Method for repetitive ion beam processing with a carbon containing ion beam | Kurt E. Williams, Alan V. Hayes | 2002-10-15 |
| 6238582 | Reactive ion beam etching method and a thin film head fabricated using the method | Kurt E. Williams, Danielle Hines, Jhon F Londono | 2001-05-29 |
| 6150755 | Charged particle source with liquid electrode | Alan V. Hayes, Victor Kanarov, Salvatore DiStefano, Emmanuel Lakios | 2000-11-21 |
| 5969470 | Charged particle source | Alan V. Hayes, Victor Kanarov, Salvatore DiStefano, Emmanuel Lakios | 1999-10-19 |