Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9146193 | Scatterometry metrology methods and methods of modeling formation of a vertical region of a multilayer semiconductor substrate to comprise a scatterometry target | Daniel E. Engelhard, Fan Ming | 2015-09-29 |
| 6238582 | Reactive ion beam etching method and a thin film head fabricated using the method | Kurt E. Williams, Boris L. Druz, Jhon F Londono | 2001-05-29 |