Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9146193 | Scatterometry metrology methods and methods of modeling formation of a vertical region of a multilayer semiconductor substrate to comprise a scatterometry target | Danielle Hines, Daniel E. Engelhard | 2015-09-29 |
| 8363150 | Lens control apparatus | Lam Sio Kuan, Cheng Kwok Sing, Yang Hua, Fan Wing Ming | 2013-01-29 |