Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9146193 | Scatterometry metrology methods and methods of modeling formation of a vertical region of a multilayer semiconductor substrate to comprise a scatterometry target | Danielle Hines, Fan Ming | 2015-09-29 |
| 7440881 | Adaptive correlation of pattern resist structures using optical metrology | Manuel Madriaga | 2008-10-21 |
| 6791679 | Adaptive correlation of pattern resist structures using optical metrology | Manuel Madriaga | 2004-09-14 |