Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12362158 | Method for OES data collection and endpoint detection | Sergey Voronin, Yan Chen, Joel Ng, Ashawaraya Shalini, Ying Zhu +1 more | 2025-07-15 |
| 12306044 | Optical emission spectroscopy for advanced process characterization | Sergey Voronin, Yan Chen, Joel Ng, Ashawaraya Shalini, Ying Zhu +1 more | 2025-05-20 |
| 12191202 | Contact openings in semiconductor devices | Andrew Metz | 2025-01-07 |
| 12158374 | Time-resolved OES data collection | Sergey Voronin, Andrej Mitrovic, Yan Chen, Joel Ng, Ashawaraya Shalini +2 more | 2024-12-03 |
| 8664012 | Combined silicon oxide etch and contamination removal process | Richard H. Gaylord, Kaushik A. Kumar | 2014-03-04 |