Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7755070 | Arrangement for the suppression of unwanted spectral components in a plasma-based EUV radiation source | René De Bruijn, Chinh Duc Tran, Jesko Brudermann, Juergen Kleinschmidt | 2010-07-13 |
| 7750327 | Device for the generation of a gas curtain for plasma-based EUV radiation sources | Chinh Duc Tran, Jesko Brudermann, Gilbert Dornieden, Thomas Brauner | 2010-07-06 |
| 7365350 | Method and arrangement for the suppression of debris in the generation of short-wavelength radiation based on a plasma | Duc Tran, Jesko Brudermann, René De Bruijn, Juergen Kleinschmidt | 2008-04-29 |