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Method and apparatus for circulating a glycol stream, and method of producing a natural gas product stream |
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Circular transmission line methods compatible with combinatorial processing of semiconductors |
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Method for cleaning platinum residues on a semiconductor substrate |
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High productivity combinatorial oxide terracing and PVD/ALD metal deposition combined with lithography for gate work function extraction |
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High productivity combinatorial workflow for photoresist strip applications |
Sean Barstow, Anh Duong, Zhendong Hong, Ashley Lacey |
2014-03-04 |
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Process to remove Ni and Pt residues for NiPtSi applications |
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2013-08-20 |
