Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11302549 | Substrate vacuum transport and storage apparatus | Sriskantharajah Thirunavukarasu, Eng Sheng Peh, Srinivas D. Nemani, Arvind Sundarrajan, Ellie Yieh | 2022-04-12 |
| 10566226 | Multi-cassette carrying case | Sriskantharajah Thirunavukarasu, Eng Sheng Peh, Srinivas D. Nemani, Arvind Sundarrajan, Ellie Yieh +2 more | 2020-02-18 |
| 10347516 | Substrate transfer chamber | Sriskantharajah Thirunavukarasu, Eng Sheng Peh, Srinivas D. Nemani, Arvind Sundarrajan, Ellie Yieh | 2019-07-09 |
| 10153187 | Methods and apparatus for transferring a substrate | Sriskantharajah Thirunavukarasu, Eng Sheng Peh, Srinivas D. Nemani, Arvind Sundarrajan, Ellie Yieh | 2018-12-11 |