Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10571430 | Gas concentration sensors and systems | Chi-Jung Cheng, Leo Chin, Christopher Morath, Raymond C. Logue | 2020-02-25 |
| 10099185 | Enhanced enclosures for acoustical gas concentration sensing and flow control | Ray Logue, Don N. Sirota, Karthik Karkala, Eric A. Armour, Christopher A. Morath | 2018-10-16 |
| 9740112 | Patterning device support and lithographic apparatus | Stephen Roux, Jean-Philippe Xavier Van Damme, Daniel Nathan Burbank, Mark Josef Schuster, Duncan G. Harris +1 more | 2017-08-22 |
| 9457947 | Lithographic apparatus and device manufacturing method | Robert Gabriël Maria Lansbergen, Peter Kochersperger, David Ramirez, Xugang Xiong, George Hilary Harrold | 2016-10-04 |