Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8636949 | Electron beam sterilization apparatus | Michael L. Bufano, Steven R. Walther, Peter F. Hays, William Frederick Thomson, Arthur Wayne Sommerstein +4 more | 2014-01-28 |
| 8293173 | Electron beam sterilization apparatus | Michael L. Bufano, Steven R. Walther, Peter F. Hays, William Frederick Thomson, Arthur Wayne Sommerstein +4 more | 2012-10-23 |
| 8202440 | Methods and apparatus for electron beam assisted etching at low temperatures | Mehran Nasser-Ghodsi, Ying Wang, Harrison H. Chin, R. Chris Burns | 2012-06-19 |
| 7202475 | Rapid defect composition mapping using multiple X-ray emission perspective detection scheme | — | 2007-04-10 |
| 7132652 | Automatic classification of defects using pattern recognition applied to X-ray spectra | — | 2006-11-07 |
| 7030375 | Time of flight electron detector | Gabor Toth | 2006-04-18 |
| 6996492 | Spectrum simulation for semiconductor feature inspection | — | 2006-02-07 |
| 6924484 | Void characterization in metal interconnect structures using X-ray emission analyses | Ying Wang | 2005-08-02 |
| 6801596 | Methods and apparatus for void characterization | Mehran Nasser-Ghodsi, Steve Oestreich | 2004-10-05 |
| 6777676 | Non-destructive root cause analysis on blocked contact or via | Ying Wang, Yeishin Tung | 2004-08-17 |
| 6753525 | Materials analysis using backscatter electron emissions | — | 2004-06-22 |