RB

R. Chris Burns

KL Kla-Tencor: 1 patents #809 of 1,394Top 60%
Overall (All Time): #3,211,673 of 4,157,543Top 80%
1
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
8202440 Methods and apparatus for electron beam assisted etching at low temperatures Mehran Nasser-Ghodsi, Ying Wang, Harrison H. Chin, Anne Testoni 2012-06-19