| 8636949 |
Electron beam sterilization apparatus |
Michael L. Bufano, Steven R. Walther, Peter F. Hays, William Frederick Thomson, Arthur Wayne Sommerstein +4 more |
2014-01-28 |
| 8293173 |
Electron beam sterilization apparatus |
Michael L. Bufano, Steven R. Walther, Peter F. Hays, William Frederick Thomson, Arthur Wayne Sommerstein +4 more |
2012-10-23 |
| 8202440 |
Methods and apparatus for electron beam assisted etching at low temperatures |
Mehran Nasser-Ghodsi, Ying Wang, Harrison H. Chin, R. Chris Burns |
2012-06-19 |
| 7202475 |
Rapid defect composition mapping using multiple X-ray emission perspective detection scheme |
— |
2007-04-10 |
| 7132652 |
Automatic classification of defects using pattern recognition applied to X-ray spectra |
— |
2006-11-07 |
| 7030375 |
Time of flight electron detector |
Gabor Toth |
2006-04-18 |
| 6996492 |
Spectrum simulation for semiconductor feature inspection |
— |
2006-02-07 |
| 6924484 |
Void characterization in metal interconnect structures using X-ray emission analyses |
Ying Wang |
2005-08-02 |
| 6801596 |
Methods and apparatus for void characterization |
Mehran Nasser-Ghodsi, Steve Oestreich |
2004-10-05 |
| 6777676 |
Non-destructive root cause analysis on blocked contact or via |
Ying Wang, Yeishin Tung |
2004-08-17 |
| 6753525 |
Materials analysis using backscatter electron emissions |
— |
2004-06-22 |