Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8330941 | Calibration method for a lithographic apparatus | Carolus Johannes Catharina Schoormans, Johannes Mathias Theodorus Antonius Adriaens | 2012-12-11 |
| 7889357 | Method for positioning a target portion of a substrate with respect to a focal plane of a projection system | Cornelis Henricus Van De Vin, Ralph Brinkhof, Arthur Winfried Eduardus Minnaert | 2011-02-15 |
| 7746484 | Method for positioning a target portion of a substrate with respect to a focal plane of a projection system | Cornelis Henricus Van De Vin, Ralph Brinkhof, Arthur Winfried Eduardus Minnaert | 2010-06-29 |
| 7684011 | Calibration method for a lithographic apparatus | Carolus Johannes Catharina Schoormans, Johannes Mathias Theodorus Antonius Adriaens | 2010-03-23 |
| 7012672 | Lithographic apparatus, system, method, computer program, and apparatus for height map analysis | Tasja Van Rhee, Thomas Josephus Maria Castenmiller, Willem Herman Gertruda Anna Koenen, Michael Broers | 2006-03-14 |