Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6910949 | Spherical cap-shaped polishing head in a chemical mechanical polishing apparatus for semiconductor wafers | — | 2005-06-28 |
| 6875091 | Method and apparatus for conditioning a polishing pad with sonic energy | Alan J. Jensen, Helmuth Treichel, Robert G. Boehm, Jr., Michael S. Lacy, Eric A. Dunton | 2005-04-05 |
| 6550091 | Double-sided wafer edge scrubbing apparatus and method for using the same | Mario Stella | 2003-04-22 |
| 6187684 | Methods for cleaning substrate surfaces after etch operations | Jeffrey Farber, Helmuth Treichel | 2001-02-13 |