Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10444635 | Lithographic method and apparatus | Carolus Johannes Catharina Schoormans, Johannes Jacobus Matheus Baselmans, Engelbertus Antonius Fransiscus Van Der Pasch, Johannes A. T. M. Van Den Homberg, Maksym SLADKOV +1 more | 2019-10-15 |
| 9587991 | Substrate layer adapted to carry sensors, actuators or electrical components | — | 2017-03-07 |
| 9410854 | Methods and devices for measuring core body temperature | — | 2016-08-09 |
| 9395633 | Lithographic cluster system, method for calibrating a positioning device of a lithographic apparatus | Alexander Alexandrovich Danilin, Alejandro Xabier Arrizabalaga Uriarte, Boris Menchtchikov | 2016-07-19 |
| 9310698 | Method and apparatus for controlling a lithographic apparatus | Boris Menchtchikov | 2016-04-12 |
| 9177219 | Method of calibrating a lithographic apparatus, device manufacturing method and associated data processing apparatus and computer program product | Wim Tjibbo Tel, Wouter Onno Pril, Thomas Theeuwes | 2015-11-03 |
| 9134625 | Lithographic apparatus and device manufacturing method for measuring wafer parameters using non-standard alignment settings | Boris Menchtchikov | 2015-09-15 |
| 9069240 | Calibration of lithographic apparatus by exposing patterns on substrate positioned at different orientations | Boris Menchtchikov | 2015-06-30 |
| 8947643 | Lithographic apparatus and method controlling parameter drift by performing multiple patterning passes on reference substrate | Boris Menchtchikov | 2015-02-03 |
| 8947630 | Lithographic apparatus and device manufacturing method | Boris Menchtchikov, Scott Anderson Middlebrooks | 2015-02-03 |
| 8902403 | Lithographic apparatus and device manufacturing method | Martinus Hendrikus Antonius Leenders, Jozef Petrus Henricus Benschop, Tao Chen | 2014-12-02 |
| 8793099 | Calibration of lithographic apparatus | Boris Menchtchikov | 2014-07-29 |
| 8717536 | Lithographic apparatus, device manufacturing method and associated data processing apparatus and computer program product | Boris Menchtchikov | 2014-05-06 |
| 8687167 | Lithographic apparatus and device manufacturing method | Boris Menchtchikov | 2014-04-01 |
| 7289409 | Method for processing a wobble signal | Bin Yin, Cornelis Marinus Schep, Aalbert Stek, Theodorus Petrus Henricus Gerardus Jansen, Mohammed Meftah | 2007-10-30 |