Issued Patents All Time
Showing 1–25 of 86 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12130008 | Light emission device and illumination apparatus | — | 2024-10-29 |
| 9568835 | Exposure apparatus with irradiation device for irradiating optical element with pulsed light having infrared wavelength, and corresponding exposure method | Takahiro Nakayama | 2017-02-14 |
| 9213231 | Reflective original, exposure method, and device manufacturing method | Masami Yonekawa | 2015-12-15 |
| 9063277 | Mirror, method of manufacturing the same, exposure apparatus, and device manufacturing method | Fumitaro Masaki | 2015-06-23 |
| 9036789 | X-ray apparatus and its adjusting method | Fumitaro Masaki, Naoya Iizuka, Mitsuaki Amemiya | 2015-05-19 |
| 9020104 | X-ray optical apparatus and adjusting method thereof | Naoya Iizuka, Mitsuaki Amemiya | 2015-04-28 |
| 9020098 | Radiation imaging apparatus | Takeo Tsukamoto, Ichiro Nomura, Mitsuaki Amemiya, Osamu Tsujii | 2015-04-28 |
| 9020102 | X-ray optical apparatus | Mitsuaki Amemiya, Ichiro Nomura, Takeo Tsukamoto | 2015-04-28 |
| 8981323 | Charged particle beam apparatus, and article manufacturing method | Ichiro Tanaka | 2015-03-17 |
| 8921807 | In situ cleaning device for lithographic apparatus | Hiromitsu Takase, Ichiro Tanaka | 2014-12-30 |
| 8760628 | Filter, exposure apparatus, and method of manufacturing device | Naoya Iizuka, Fumitaro Masaki | 2014-06-24 |
| 8730449 | Optical device and device manufacturing method | Naoya Iizuka, Fumitaro Masaki | 2014-05-20 |
| 8716672 | Charged particle optical system, drawing apparatus, and method of manufacturing article | Kentaro Sano, Masato Muraki, Yoshikiyo Yui | 2014-05-06 |
| 8710737 | Light-emitting device | Shingo Matsuura, Tomoya Tabuchi, Kousuke Katabe, Yuki Mori, Daisuke Sakumoto | 2014-04-29 |
| 8704663 | Work direction determining method and device, and work provided with direction determining function | Yoshiharu Hino, Daisuke Kuroki, Takuya Yamaguchi, Yusuke Minemura | 2014-04-22 |
| 8698095 | Charged particle beam drawing apparatus and article manufacturing method | Ichiro Tanaka, Hiromitsu Takase | 2014-04-15 |
| 8581487 | Light-emitting device with reflection layers | Takashi Sawai, Emi Mukai, Kousuke Katabe | 2013-11-12 |
| 8529089 | Light emitting device and illumination device | Kousuke Katabe, Yuki Mori, Shingo Matsuura | 2013-09-10 |
| 8106584 | Light emitting device and illumination apparatus | Tomoya Tabuchi, Daisuke Sakumoto | 2012-01-31 |
| 7858958 | Evaluation method and fabrication method of optical element having multilayer film, exposure apparatus having the multilayer film, and device fabrication method | Takeshi Miyachi | 2010-12-28 |
| 7785407 | Evaporated fuel gas adsorbent, evaporated fuel gas trapping apparatus, active carbon and process for producing the same | Susumu Abe, Shizuo Ishimura, Takanori Kitamura, Yoshifumi Egawa, Takayuki Yamada +1 more | 2010-08-31 |
| 7771898 | Multilayer mirror, evaluation method, exposure apparatus, device manufacturing method | Fumitaro Masaki | 2010-08-10 |
| 7544960 | Evaluation method and fabrication method of optical element having multilayer film, exposure apparatus having the multilayer film, and device fabrication method | Takeshi Miyachi | 2009-06-09 |
| 7543948 | Multilayer mirror manufacturing method, optical system manufacturing method, exposure apparatus, and device manufacturing method | — | 2009-06-09 |
| 7453560 | Method of evaluating optical element | — | 2008-11-18 |