Issued Patents All Time
Showing 26–50 of 63 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10123131 | Microelectromechanical microphone with differential capacitive sensing | Fang Liu, Thomas Chen | 2018-11-06 |
| 10071906 | Release chemical protection for integrated complementary metal-oxide-semiconductor (CMOS) and micro-electro-mechanical (MEMS) devices | Fariborz Assaderaghi | 2018-09-11 |
| 9828240 | Integrated CMOS back cavity acoustic transducer and the method of producing the same | Fang Liu, Brian H. Kim, Anthony D. Minervini | 2017-11-28 |
| 9802815 | Method for MEMS structure with dual-level structural layer and acoustic port | Mei-Lin Chan, Martin Lim, Fariboz Assaderaghi, Erhan Polatkan Ata | 2017-10-31 |
| 9617141 | MEMS device and process for RF and low resistance applications | Martin Lim, Xiang Li, Li-Wen Hung | 2017-04-11 |
| 9540230 | Methods for CMOS-MEMS integrated devices with multiple sealed cavities maintained at various pressures | Martin Lim, Kegang Huang, Igor Tchertkov | 2017-01-10 |
| 9511994 | Aluminum nitride (AlN) devices with infrared absorption structural layer | Julius Ming-Lin Tsai | 2016-12-06 |
| 9487396 | Release chemical protection for integrated complementary metal-oxide-semiconductor (CMOS) and micro-electro-mechanical (MEMS) devices | Fariborz Assaderaghi | 2016-11-08 |
| 9428379 | MEMS acoustic sensor with integrated back cavity | Erhan Polatkan Ata, Martin Lim, Xiang Li, Stephen Lloyd | 2016-08-30 |
| 9344808 | Differential sensing acoustic sensor | Mei-Lin Chan, Erhan Polatkan Ata, Xiang Li, Martin Lim | 2016-05-17 |
| 9299671 | Integrated CMOS back cavity acoustic transducer and the method of producing the same | Fang Liu, Brian H. Kim, Anthony D. Minervini | 2016-03-29 |
| 9227842 | Method for MEMS structure with dual-level structural layer and acoustic port | Mei-Lin Chan, Martin Lim, Fariboz Assaderaghi, Erhan Polatkan Ata | 2016-01-05 |
| 9221676 | Internal electrical contact for enclosed MEMS devices | Kegang Huang, Jongwoo Shin, Martin Lim, Joseph Seeger | 2015-12-29 |
| 9114977 | MEMS device and process for RF and low resistance applications | Martin Lim, Xiang Li, Li-Wen Hung | 2015-08-25 |
| 9035428 | Integrated structure with bidirectional vertical actuation | Martin Lim, Li-Wen Hung, Stephen Lloyd | 2015-05-19 |
| 8945969 | Internal electrical contact for enclosed MEMS devices | Kegang Huang, Jongwoo Shin, Martin Lim, Joseph Seeger | 2015-02-03 |
| 8822252 | Internal electrical contact for enclosed MEMS devices | Kegang Huang, Jongwoo Shin, Martin Lim, Joseph Seeger | 2014-09-02 |
| 8692340 | MEMS acoustic sensor with integrated back cavity | Erhan Polatkan Ata, Martin Lim, Xiang Li, Stephen Lloyd | 2014-04-08 |
| 8564076 | Internal electrical contact for enclosed MEMS devices | Kegang Huang, Jongwoo Shin, Martin Lim, Joseph Seeger | 2013-10-22 |
| 8384134 | MEMS device including an electrical interconnect through a substrate | Steven S. Nasiri, Martin Lim | 2013-02-26 |
| 7183633 | Optical cross-connect system | Franklin J. Wall, Jr., Behrang Behin, Murali Chaparala, Mark Chang, Scott Dalton +5 more | 2007-02-27 |
| 7177081 | High contrast grating light valve type device | Akira Tomita, David T. Amm, James Hunter, Bryan P. Staker | 2007-02-13 |
| 7023604 | Three dimensional optical switches and beam steering modules | Behrang Behin, Robert Conant, David Horsley, Meng-Hsiung Kiang, David Lerner +1 more | 2006-04-04 |
| 6888979 | MEMS mirrors with precision clamping mechanism | Behrang Behin, Chuang-Chia Lin, Boris Kobrin, Murali Chaparala, Gary M. Zalewski | 2005-05-03 |
| 6887391 | Fabrication and controlled release of structures using etch-stop trenches | Behrang Behin | 2005-05-03 |