Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9802815 | Method for MEMS structure with dual-level structural layer and acoustic port | Michael Julian Daneman, Mei-Lin Chan, Martin Lim, Erhan Polatkan Ata | 2017-10-31 |
| 9227842 | Method for MEMS structure with dual-level structural layer and acoustic port | Michael Julian Daneman, Mei-Lin Chan, Martin Lim, Erhan Polatkan Ata | 2016-01-05 |