Issued Patents All Time
Showing 26–50 of 56 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7279693 | Source multiplexing in lithography | Peter J. Silverman | 2007-10-09 |
| 7253939 | Superconductor-based modulator for extreme ultraviolet (EUV) | David Williams | 2007-08-07 |
| 7237914 | Light condenser | — | 2007-07-03 |
| 7199936 | Method and apparatus for polarizing electromagnetic radiation | David Williams, James P. Kardach | 2007-04-03 |
| 7193532 | Means and method of providing information to a law enforcement officer regarding a stopped vehicle | — | 2007-03-20 |
| 7183565 | Source multiplexing in lithography | Peter J. Silverman | 2007-02-27 |
| 7167295 | Method and apparatus for polarizing electromagnetic radiation | David Williams, James P. Kardach | 2007-01-23 |
| 7139135 | Apparatus for adjustment of partial coherence of light energy in an imaging system | John Urata | 2006-11-21 |
| 7070832 | Sublimating process for cleaning and protecting lithography masks | — | 2006-07-04 |
| 7057262 | High reflector tunable stress coating, such as for a MEMS mirror | — | 2006-06-06 |
| 7033739 | Active hardmask for lithographic patterning | Manish Chandhok, Eric Panning, Robert L. Bristol, Bryan Rice | 2006-04-25 |
| 7034320 | Dual hemispherical collectors | Peter J. Silverman | 2006-04-25 |
| 7022443 | Compensation of reflective mask effects in lithography systems | Manish Chandhok | 2006-04-04 |
| 7002164 | Source multiplexing in lithography | Peter J. Silverman | 2006-02-21 |
| 6903354 | Extreme ultraviolet transition oscillator | — | 2005-06-07 |
| 6884361 | Method for making a mirror for photolithography | — | 2005-04-26 |
| 6846086 | Mirror assembly with thermal contour control | — | 2005-01-25 |
| 6816648 | Integrated waveguide gratings by ion implantation | — | 2004-11-09 |
| 6801298 | Light condenser | — | 2004-10-05 |
| 6730615 | High reflector tunable stress coating, such as for a MEMS mirror | — | 2004-05-04 |
| 6707602 | Reflective spectral filtering of high power extreme ultra-violet radiation | — | 2004-03-16 |
| 6700700 | Reflective spectral filtering of high power extreme ultra-violet radiation | — | 2004-03-02 |
| 6671054 | Interferometric patterning for lithography | — | 2003-12-30 |
| 6671088 | Reflective spectral filtering of high power extreme ultra-violet radiation | — | 2003-12-30 |
| 6611387 | Adjustment of the partial coherence of the light energy in an imaging system | John Urata | 2003-08-26 |