Issued Patents All Time
Showing 51–56 of 56 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6577442 | Reflective spectral filtering of high power extreme ultra-violet radiation | — | 2003-06-10 |
| 6522465 | Transmitting spectral filtering of high power extreme ultra-violet radiation | — | 2003-02-18 |
| 6490031 | Radiometric scatter monitor | Keith William ANDRESEN | 2002-12-03 |
| 6030514 | Method of reducing sputtering burn-in time, minimizing sputtered particulate, and target assembly therefor | John A. Dunlop, Gerald Feldewerth, Cari H. Shim, Stephan Schittny | 2000-02-29 |
| 5494439 | Si/SiC composite material and method for making Si/SiC composite material | Cari H. Shim | 1996-02-27 |
| 5417803 | Method for making Si/SiC composite material | Cari H. Shim | 1995-05-23 |