Issued Patents All Time
Showing 76–84 of 84 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7033739 | Active hardmask for lithographic patterning | Michael Goldstein, Eric Panning, Robert L. Bristol, Bryan Rice | 2006-04-25 |
| 7022443 | Compensation of reflective mask effects in lithography systems | Michael Goldstein | 2006-04-04 |
| 6982133 | Damage-resistant coatings for EUV lithography components | Kramadhati V. Ravi | 2006-01-03 |
| 6972843 | Lithography alignment | — | 2005-12-06 |
| 6850050 | Reticle inspection | Julian Montoya | 2005-02-01 |
| 6809328 | Protective coatings for radiation source components | Kramadhati V. Ravi, Robert L. Bristol, Melissa Shell | 2004-10-26 |
| 6700649 | Method for improved resolution of patterning using binary masks with pupil filters | Brandon Barnett | 2004-03-02 |
| 6567155 | Method for improved resolution of patterning using binary masks with pupil filters | Brandon Barnett | 2003-05-20 |
| 6549272 | Method for improved resolution of patterning using binary masks with pupil filters | Brandon Barnett | 2003-04-15 |