Issued Patents All Time
Showing 26–36 of 36 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6046099 | Plug or via formation using novel slurries for chemical mechanical polishing | Daniel A. Feller | 2000-04-04 |
| 5954975 | Slurries for chemical mechanical polishing tungsten films | Daniel A. Feller | 1999-09-21 |
| 5836806 | Slurries for chemical mechanical polishing | Daniel A. Feller | 1998-11-17 |
| 5783478 | Method of frabricating a MOS transistor having a composite gate electrode | Robert S. Chau, David B. Fraser, Gopal Raghavan, Leopoldo D. Yau | 1998-07-21 |
| 5700383 | Slurries and methods for chemical mechanical polish of aluminum and titanium aluminide | A. Feller | 1997-12-23 |
| 5625217 | MOS transistor having a composite gate electrode and method of fabrication | Robert S. Chau, David B. Fraser, Gopal Raghavan, Leopoldo D. Yau | 1997-04-29 |
| 5611943 | Method and apparatus for conditioning of chemical-mechanical polishing pads | Leopoldo D. Yau | 1997-03-18 |
| 5604158 | Integrated tungsten/tungsten silicide plug process | Srinivasam Sivaram | 1997-02-18 |
| 5516346 | Slurries for chemical mechanical polishing | Daniel A. Feller | 1996-05-14 |
| 5407526 | Chemical mechanical polishing slurry delivery and mixing system | Donald Danielson, Allen D. Feller | 1995-04-18 |
| 5340370 | Slurries for chemical mechanical polishing | Daniel A. Feller | 1994-08-23 |