| 7087188 |
Abrasives for chemical mechanical polishing |
Kenneth Cadien |
2006-08-08 |
| 6909193 |
High pH slurry for chemical mechanical polishing of copper |
Anne Miller, Kenneth Cadien |
2005-06-21 |
| 6881674 |
Abrasives for chemical mechanical polishing |
Kenneth Cadien |
2005-04-19 |
| 6825117 |
High PH slurry for chemical mechanical polishing of copper |
Anne Miller, Kenneth Cadien |
2004-11-30 |
| 6752844 |
Ceric-ion slurry for use in chemical-mechanical polishing |
Anne Miller, Kenneth Cadien |
2004-06-22 |
| 6740591 |
Slurry and method for chemical mechanical polishing of copper |
Anne Miller, Kenneth Cadien |
2004-05-25 |
| 6719614 |
Method and chemistry for cleaning of oxidized copper during chemical mechanical polishing |
Anne Miller, Kenneth Cadien |
2004-04-13 |
| 6464568 |
Method and chemistry for cleaning of oxidized copper during chemical mechanical polishing |
Anne Miller, Kenneth Cadien |
2002-10-15 |
| 6443814 |
Method and chemistry for cleaning of oxidized copper during chemical mechanical polishing |
Anne Miller, Kenneth Cadien |
2002-09-03 |
| 5700383 |
Slurries and methods for chemical mechanical polish of aluminum and titanium aluminide |
Kenneth Cadien |
1997-12-23 |