Issued Patents All Time
Showing 26–50 of 74 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8993311 | Multi-stage cartridge for MEMS particle storing system | Daryl W. Grummitt, John C. Harley, James P. Linton, Jaquelin K. Spong, Douglas L. Thompson | 2015-03-31 |
| 8871500 | MEMS particle sorting actuator and method of manufacturing | Daryl W. Grummitt, John C. Harley, Jaquelin K. Spong, Kimberly L. Turner | 2014-10-28 |
| 8822207 | Cartridge for MEMS particle sorting system | Daryl W. Grummitt, John C. Harley, James P. Linton, Jaquelin K. Spong | 2014-09-02 |
| 8736081 | Wafer level hermetic bond using metal alloy with keeper layer | Christopher S. Gudeman, Alok Paranjpye, Jaquelin K. Spong, Douglas L. Thompson | 2014-05-27 |
| 8690830 | In-plane electromagnetic MEMS pump | Gregory A. Carlson, Christopher S. Gudeman, Steven S. Hovey, Paul J. Rubel | 2014-04-08 |
| 8541735 | Inlaid optical material and method of manufacture | John C. Harley, Ian R. Johnston, Jeffery F. Summers | 2013-09-24 |
| 8466760 | Configurable power supply using MEMS switch | Christopher S. Gudeman | 2013-06-18 |
| 8343791 | Plating process and apparatus for through wafer features | John C. Harley, Jeffery F. Summers | 2013-01-01 |
| 8288211 | Wafer level hermetic bond using metal alloy with keeper layer | Alok Paranjpye, Douglas L. Thompson | 2012-10-16 |
| 8264307 | Dual substrate MEMS plate switch and method of manufacture | Alok Paranjypye, Paul J. Rubel | 2012-09-11 |
| 7893798 | Dual substrate MEMS plate switch and method of manufacture | Kimberly L. Turner | 2011-02-22 |
| 7864006 | MEMS plate switch and method of manufacture | Paulo Silveira da Motta, Alok Paranjpye, Kimon Rybnicek | 2011-01-04 |
| 7812703 | MEMS device using NiMn alloy and method of manufacture | Gregory A. Carlson, Donald C. Liu, Douglas L. Thompson | 2010-10-12 |
| 7785913 | System and method for forming moveable features on a composite substrate | Paul J. Rubel, Kimon Rybnicek, Paulo Silveira da Motta | 2010-08-31 |
| 7759152 | MEMS thermal actuator and method of manufacture | Gregory A. Carlson, Christopher S. Gudeman, Paul J. Rubel | 2010-07-20 |
| 7713786 | Etching/bonding chamber for encapsulated devices and method of use | Jeffrey F. Summers | 2010-05-11 |
| 7675162 | Interconnect structure using through wafer vias and method of fabrication | Steven Hovey, Paul J. Rubel, Kimon Rybnicek | 2010-03-09 |
| 7622783 | MEMS thermal actuator and method of manufacture | Gregory A. Carlson, Christopher S. Gudeman, Paul J. Rubel | 2009-11-24 |
| 7528691 | Dual substrate electrostatic MEMS switch with hermetic seal and method of manufacture | Andrew Wallis, Paul J. Rubel, Kimon Rybnicek, Michael Shillinger, Jeffrey F. Summers | 2009-05-05 |
| 7264972 | Method and apparatus for sorting biological cells with a MEMS device | — | 2007-09-04 |
| 7229838 | MEMS actuator and method of manufacture for MEMS particle sorting device | John C. Harley, Steven Hovey, Richard Martin, Hung D. Nguyen, Paul J. Rubel | 2007-06-12 |
| 7220594 | Method and apparatus for sorting particles with a MEMS device | John C. Harley, Steven Hovey, Richard Martin, Hung D. Nguyen, Paul J. Rubel | 2007-05-22 |
| 7210352 | MEMS teeter-totter apparatus with curved beam and method of manufacture | Paul J. Rubel | 2007-05-01 |
| 7141080 | Method and apparatus for assembling an array of micro-devices | Patrick Edward Feierabend, Richard Martin, Paul J. Rubel, John W. Stocker, Jeffery F. Summers +1 more | 2006-11-28 |
| 7057245 | Method and apparatus for assembling an array of micro-devices | Patrick Edward Feierabend, Richard Martin, Jeffery F. Summers, Andrew Wallis, Paul J. Rubel +1 more | 2006-06-06 |